韩国三级大全久久网站,日本三级韩国三级三级A级,99久久综合狠狠综合久久止

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          1. 產品中心 > 高效電池生產設備 > 管式等離子體多晶硅薄膜淀積爐

            管式等離子體多晶硅薄膜淀積爐

            設備名稱 Equipment Name

            管式等離子體多晶硅薄膜淀積爐  Horizontal PECVD (poly-Si)

            設備型號 Equipment Model

            PD-520


            設備用途 Equipment Application

            本設備主要用于N-TOPCon電池制備隧穿氧化層、本征poly-si、摻雜poly-si、掩膜層。

            This equipment is mainly used for the deposition of tunnel oxide layer, intrinsic poly-si layer, poly-si layer doping and mask layer for TOPCon solar cells.


            工藝流程  Process Flow

            石墨舟及硅片準備→管內充氮氣→進舟→抽真空、壓力測試→淀積多層復合膜→抽真空、壓力測試→清管路、充氮氣→退舟

            Graphite boat & wafers ready→nitrogen inlet→graphite boat load in→vacuumize, pressure test→multi layers deposition→vacuumize, pressure test→Pipe purging, nitrogen inlet→graphite boat unload


            技術特點  Features

            1、隧穿氧化層、本征poly-Si、摻雜poly-Si、掩膜層,四種工藝薄膜一次原位完成。

            Tunnel oxide layer, intrinsic Poly-Si, doping Poly-Si, mask layer, four processes completed in one in-situ doping.

            2、具備原位清洗功能。
            With in-situ clean. 

            3、雙水冷密封技術。
            Double water-cooled sealing technology.

            4、專利內加熱技術。
            Patented internal heating technology.

            5、高速平穩整體模組推舟機構。
            High-speed integral module boat pushing mechanism.

            6、懸浮承載舟技術。
            Graphite boat contact-free with quartz tube.

            7、自主知識產權MES軟件。
            MES software with independent intellectual property right.

            8、自主開發中央計算機集中控制系統。

            Independently developed CCC system.

            9、快速鍍膜技術。
            Fast coating technology.

            10、全面的防超溫、斷偶、撞舟等安全報警保護功能。

            Alarm protection for over-heating, thermocouple-break and boat collision.


            設備參數  Parameters

            PD520.png



            韩国三级大全久久网站,日本三级韩国三级三级A级,99久久综合狠狠综合久久止