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      PRODUCTS > Crystalline Solar Cell Automation Equipment > Automatic Wafer Handling System for DOA Equipment

      Automatic Wafer Handling System for DOA Equipment

      Equipment Name

      Automatic Wafer Handling System for DOA Equipment

      Equipment Model

      SYZ-VI-B

      Equipment Application

      Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading& unloading can guarantee the continuous production or be used only for wafer loading or unloading is also available.

       

      Features

      · With imported six-axis lift to load/unload and ensures high reliability of picking and placing of wafers;·With IPC based running master computer software in HMI, high speed data interaction can be realized by network communication.
      · With precise detection components to dectect the dynamic position of the quartz boat to rectifying the positioning.  
      · With cooling system before the unloading process, which can avoid any harmful effect on the wafers and equipment caused by high temperature.
      · The comb,gripper adopt special processing technology which greatly reduce the marks on wafers. 
      · Cassette can be vertical or horizontal, customer can choose flexibly according to their needs. 
      · MES function, sheet resistance detection and AGV, optional.

       

      Parameters


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