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      Horizontal PECVD

      Equipment Name

      Horizontal PECVD

      Equipment Model

      PD-520

      Equipment Application

      Mainly used for generating highest quality anti-reflective coatings in the production of crystal silicon solar cells, and for deposition of passivation film on the rear side of solar cells.


      ProcessFlow

      Graphite boat & wafers ready→ Nitrogen inlet→ Graphite boat load in→ Vacuumize, pressure test →Ammonia pre-clean and check→ Vacuumize the tube, leak-checking, constant temperature→ Pre-coating →Coating→ Vacuumize, pressure test→ Tube cleaning and Nitrogen inlet→ Graphite boat unload.


      Features

      · Compatible with SiOxNy PERC process.

      · Double cooling water flanges sealing technology.

      · Patented internal heating technology.

      · High-speed integral module boat pushing mechanism.

      · Graphite boat contact-free with quartz tube.

      · MES software with independent intellectual property right.

      · Independently developed CCC system. 

      · Fast coating technology.

      · Alarm protection for over-heating, thermocouple -break and boat collision.


      Parameters


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